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Advanced Packaging Lithography

DuPont Advanced Packaging Lithography has more than 30 years of experience with dry film photoresists. APL manufactures microlithographic polymer films for advanced semiconductor packaging applications, including:

  • Wafer bumping
  • UBM formation
  • Copper pillars
  • Lift off
  • TSV
  • Permanent and temporary bonding
  • Backside wafer coating
  • MEMS applications

DuPont offers the most advanced negative photoresist formulations for excellent productivity, environmental responsibility, simple processing and high yields. Our dry film photoresist solutions allow solvent free, aqueous-based developer and remover processing , without jeopardizing cleanliness and resolution.

 
Products & Services

Our photoresist dry films are engineered to deliver high quality, cleanliness, superior thickness control and side wall geometry without the need for edge bead removal, soft bakes and other unnecessary process steps.

 

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